R&D / pilot / Research / campus

Leuven Research Infrastructure
Leuven

imec · Semiconductor R&D and pilot infrastructure

Semiconductor R&DPilot line300 mm

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Public facility record

Project state: R&D / pilot
Location: Leuven, Belgium
Location precision: campus
Role: Semiconductor R&D and pilot infrastructure
Site functions: Semiconductor R&D · Pilot line
Products: Not disclosed in selected source
Processes: Not disclosed in selected source
Wafer sizes: 300 mm
Public Scale: 300 mm research program publicly described
Production: Research infrastructure; not a commercial fab-capacity claim
Work: Nanoelectronics research and pilot-line development

Public equipment disclosures

reported exact

TWINSCAN EXE:5200

ASML · Installed in the Leuven pilot line in March 2026

1 reported

This count covers the specifically announced High-NA tool, not every lithography system at imec.

imec advanced patterning infrastructure ↗

Public relationships

joint research with

imec → ASML

Joint High-NA EUV lab and pilot-line program

imec advanced patterning infrastructure ↗

Production, capacity, employment, exact coordinates and equipment totals are not inferred. Undisclosed values remain undisclosed.